• DocumentCode
    1876055
  • Title

    High current, high current density field emitter array cathodes

  • Author

    Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.

  • Author_Institution
    Microsystems Eng. Center, SRI Int., Menlo Park, CA, USA
  • fYear
    2004
  • fDate
    16-16 July 2004
  • Firstpage
    232
  • Abstract
    Summary form only given. Field emitter array cathodes have historically not achieved their full potential due to imperfect spatial uniformity of emission. To address this issue, an in situ cathode processing technique was used to demonstrate an emission current of 300 mA from a 50,000-tip array covering an area of 7.8×10/sup -3/ cm/sup 2/. This corresponds to a current density of 38 A/cm/sup 2/. To the authors´ knowledge, such a total emission current from single FEA´s has never been reported.
  • Keywords
    cathodes; current density; field emitter arrays; emission current; high current density field emitter array cathodes; in situ cathode processing technique; Cathodes; Current density; Field emitter arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
  • Conference_Location
    Cambridge, MA, USA
  • Print_ISBN
    0-7803-8397-4
  • Type

    conf

  • DOI
    10.1109/IVNC.2004.1354989
  • Filename
    1354989
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1876055