Title :
Comparison of heater architectures for thermal control of silicon photonic circuits
Author :
Masood, A. ; Pantouvaki, M. ; Lepage, G. ; Verheyen, P. ; Van Campenhout, J. ; Absil, P. ; Van Thourhout, Dries ; Bogaerts, W.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We present a comparison of integrated heaters for silicon photonics, based on doped silicon, silicide and tungsten metallization, with and without trenches and undercut for insulation. Results show similar thermo-optic efficiency, but with electrical resistivities spanning 2 orders of magnitude.
Keywords :
electrical resistivity; elemental semiconductors; integrated circuit metallisation; integrated optoelectronics; silicon; thermo-optical effects; Si; doped silicon metallization; electrical resistivities; insulation; integrated heater architectures; silicide metallization; silicon photonic circuits; thermal control; thermo-optic efficiency; tungsten metallization; Insulation; Optical waveguides; Photonics; Resistance heating; Silicon; Tungsten;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644437
