Title :
Modulator integration in high-performance BiCMOS
Author :
Zimmermann, L. ; Knoll, D. ; Lischke, S. ; Richter, H. ; Winzer, G. ; Thomson, David J. ; Gardes, Frederic Y. ; Hu, Ya ; Reed, Graham T. ; Goll, B. ; Porte, H. ; Voigt, K. ; Tillack, Bernd
Author_Institution :
IHP, Frankfurt (Oder), Germany
Abstract :
We present results for FEOL integration of Silicon electro-optic waveguides with high-performance BiCMOS technology. The new technology allows for dense co-integration of high-speed analogue RF circuits and Silicon modulators.
Keywords :
BiCMOS integrated circuits; electro-optical modulation; elemental semiconductors; integrated optoelectronics; microwave photonics; optical waveguides; silicon; FEOL integration; Si; dense cointegration; frontend-of-line integration; high-performance BiCMOS; high-speed analogue RF circuits; silicon electro-optic waveguides; silicon modulators; BiCMOS integrated circuits; CMOS integrated circuits; Modulation; Optical waveguides; Photonics; Silicon; Substrates;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644438
