DocumentCode
1876087
Title
Modulator integration in high-performance BiCMOS
Author
Zimmermann, L. ; Knoll, D. ; Lischke, S. ; Richter, H. ; Winzer, G. ; Thomson, David J. ; Gardes, Frederic Y. ; Hu, Ya ; Reed, Graham T. ; Goll, B. ; Porte, H. ; Voigt, K. ; Tillack, Bernd
Author_Institution
IHP, Frankfurt (Oder), Germany
fYear
2013
fDate
28-30 Aug. 2013
Firstpage
85
Lastpage
86
Abstract
We present results for FEOL integration of Silicon electro-optic waveguides with high-performance BiCMOS technology. The new technology allows for dense co-integration of high-speed analogue RF circuits and Silicon modulators.
Keywords
BiCMOS integrated circuits; electro-optical modulation; elemental semiconductors; integrated optoelectronics; microwave photonics; optical waveguides; silicon; FEOL integration; Si; dense cointegration; frontend-of-line integration; high-performance BiCMOS; high-speed analogue RF circuits; silicon electro-optic waveguides; silicon modulators; BiCMOS integrated circuits; CMOS integrated circuits; Modulation; Optical waveguides; Photonics; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location
Seoul
ISSN
1949-2081
Print_ISBN
978-1-4673-5803-3
Type
conf
DOI
10.1109/Group4.2013.6644438
Filename
6644438
Link To Document