Title :
A potassium electret energy harvester for 3D-stack assembly
Author :
Misawa, Kensuke ; Tatsuhiko, Sugiyama ; Hashiguchi, Gen ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Res. Center for Adv. Sci. & Technol. (RCAST), Univ. of Tokyo, Tokyo, Japan
Abstract :
We report an electrostatic energy harvester based on the potassium ion (K+) electret that could be stacked up into a 3D structure to multiply the output power. Vertical comb electrodes are implemented in a silicon-on-insulator (SOI) wafer with a relatively heavy mass in the handle layer to lower the resonance. A single substrate formation exhibited a 0.34 μW output at 310 Hz for a load resistance of 1 MΩ.
Keywords :
electrets; electrochemical electrodes; electrostatic devices; energy harvesting; potassium; silicon-on-insulator; 3D-stack assembly; SOI wafer; frequency 310 Hz; load resistance; potassium electret electrostatic energy harvester; power 0.34 muW; resistance 310 Mohm; silicon-on-insulator wafer; vertical comb electrode; Electrets; Electrodes; Electrostatics; Micromechanical devices; Resonant frequency; Temperature sensors; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7051148
