• DocumentCode
    1876179
  • Title

    Vertically-curved silicon waveguide fabricated by ion-induced bending method for vertical light coupling

  • Author

    Yoshida, Takafumi ; Nishi, Tomoki ; Tajima, Shinya ; Takei, Ryohei ; Suzuki, M. ; Omoda, E. ; Nagao, Masaru ; Miura, Naruhisa ; Mori, Marco ; Sakakibara, Y.

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2013
  • fDate
    28-30 Aug. 2013
  • Firstpage
    89
  • Lastpage
    90
  • Abstract
    Silicon waveguide curving in the vertical direction from the substrate was fabricated using ion-induced bending method. Vertical light emission from the waveguide was observed.
  • Keywords
    elemental semiconductors; integrated optics; light propagation; optical couplers; optical fabrication; optical waveguides; silicon; Si; ion-induced bending method; vertical light coupling; vertical light emission; vertically-curved silicon waveguide fabrication; waveguide curving; Couplers; Couplings; Fabrication; Optical waveguides; Radiation effects; Silicon; Wires; ion induced bending (IIB); photonic integrated circuits (PICs); vertically curved silicon waveguide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
  • Conference_Location
    Seoul
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4673-5803-3
  • Type

    conf

  • DOI
    10.1109/Group4.2013.6644440
  • Filename
    6644440
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1876179