Title :
Low-loss optical interlayer transfer for three-dimensional optical interconnect
Author :
Takei, Ryohei ; Omoda, E. ; Suzuki, M. ; Manako, Shoko ; Kamei, Toshihiro ; Mori, Marco ; Sakakibara, Y.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
We demonstrated a vertical optical interlayer transfer device composed of a pair of inverse taper spot-size converters with an insertion loss of 1.8 dB using a CMOS back-end compatible process.
Keywords :
CMOS integrated circuits; integrated optics; integrated optoelectronics; optical interconnections; optical losses; CMOS back-end compatible process; insertion loss; inverse taper spot-size converters; low-loss optical interlayer transfer; three-dimensional optical interconnect; vertical optical interlayer transfer device; Optical device fabrication; Optical interconnections; Optical losses; Optical reflection; Optical waveguides; Silicon; inverse taper type spot-size converter; on-chip optical interconnect; silicon photonics; three-dimensional optical circuit;
Conference_Titel :
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4673-5803-3
DOI :
10.1109/Group4.2013.6644441
