• DocumentCode
    1876199
  • Title

    Low-loss optical interlayer transfer for three-dimensional optical interconnect

  • Author

    Takei, Ryohei ; Omoda, E. ; Suzuki, M. ; Manako, Shoko ; Kamei, Toshihiro ; Mori, Marco ; Sakakibara, Y.

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2013
  • fDate
    28-30 Aug. 2013
  • Firstpage
    91
  • Lastpage
    92
  • Abstract
    We demonstrated a vertical optical interlayer transfer device composed of a pair of inverse taper spot-size converters with an insertion loss of 1.8 dB using a CMOS back-end compatible process.
  • Keywords
    CMOS integrated circuits; integrated optics; integrated optoelectronics; optical interconnections; optical losses; CMOS back-end compatible process; insertion loss; inverse taper spot-size converters; low-loss optical interlayer transfer; three-dimensional optical interconnect; vertical optical interlayer transfer device; Optical device fabrication; Optical interconnections; Optical losses; Optical reflection; Optical waveguides; Silicon; inverse taper type spot-size converter; on-chip optical interconnect; silicon photonics; three-dimensional optical circuit;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
  • Conference_Location
    Seoul
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4673-5803-3
  • Type

    conf

  • DOI
    10.1109/Group4.2013.6644441
  • Filename
    6644441