DocumentCode :
1876666
Title :
Three-axis piezoelectric vibration energy harvester
Author :
Aktakka, Ethem Erkan ; Najafi, Khalil
Author_Institution :
Center for Wireless Integrated MicroSensing & Syst. (WIMS2), Univ. of Michigan, Ann Arbor, MI, USA
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
1141
Lastpage :
1144
Abstract :
This paper reports for the first time a piezoelectric inertial harvester for scavenging vibrational energy in all three dimensions. The harvester is formed of optimized bulk-PZT/Si crab legs such that the first three resonance vibrational modes are in-plane and out-of-plane translational modes with closely-spaced frequencies (387-398 Hz). Partitioned electrodes on the PZT arms collect mechanical energy in the transverse (d31) piezoelectric mode, and have phase difference in their voltage outputs according to the axis of the applied vibration. The harvester is realized using a planar micro-fabrication method, with internal and packaged device volumes of 2.5 and 6.5 cm3, respectively. The device has generated 5-53 μW from 50 mg acceleration applied in in-plane and out-of-plane directions at the respective resonance frequencies, and has a half-power bandwidth of 8-16 Hz. The normalized power density (0.3-3.2 mW/cm3/g2) compares favorably with respect to previously reported multi-axis inertial energy harvesters.
Keywords :
energy harvesting; microfabrication; piezoelectric transducers; vibrations; PZT-Si; bandwidth 8 Hz to 16 Hz; bulk-PZT-Si crab leg; mechanical energy collection; partitioned electrode; planar microfabrication method; power density; three-axis inertial piezoelectric vibration energy harvester; transverse piezoelectric mode; vibrational energy scavenging; Acceleration; Electrodes; Energy harvesting; Frequency measurement; Resonant frequency; Silicon; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
Type :
conf
DOI :
10.1109/MEMSYS.2015.7051166
Filename :
7051166
Link To Document :
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