DocumentCode
1876912
Title
Configurable silicon photonics with electron beam bleaching
Author
Petrov, A.Yu. ; Prorok, Stefan ; Eich, M. ; Jingdong Luo ; Jen, Alex K.
Author_Institution
Inst. for Opt. & Electron. Mater., Hamburg Univ. of Technol., Hamburg, Germany
fYear
2013
fDate
28-30 Aug. 2013
Firstpage
13
Lastpage
14
Abstract
A concept is proposed and realized for post-fabrication trimming as well as new structures fabrication on functionalized silicon platform. Electron beam bleaching of a chromophore doped polymer cladding is applied.
Keywords
bleaching (materials processing); cladding techniques; elemental semiconductors; integrated optics; optical fabrication; optical polymers; silicon; Si; chromophore doped polymer cladding; configurable silicon photonics; electron beam bleaching; functionalized silicon platform; post-fabrication trimming; structures fabrication; Bleaching; Cavity resonators; Electron beams; Photonic crystals; Polymers; Refractive index; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2013 IEEE 10th International Conference on
Conference_Location
Seoul
ISSN
1949-2081
Print_ISBN
978-1-4673-5803-3
Type
conf
DOI
10.1109/Group4.2013.6644466
Filename
6644466
Link To Document