Title :
Strong Purcell effect for quantum boxes in micropillars and microdisks
Author :
Gerard, J.M. ; Gayral, B. ; Sermage, B.
Author_Institution :
CNET, Bagneux, France
Abstract :
Summary form only given. We report the fabrication of both GaAs-AlAs micropillars and GaAs microdisks displaying an improved optical quality. By optimising the reactive ion etching of micropillars, Q´s as high as 2000 for 1 /spl mu/m diameter pillars could be obtained. Microdisks have been fabricated through a novel process based on a two-step wet etching.
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; microdisc lasers; optical fabrication; quantum well lasers; semiconductor quantum dots; semiconductor technology; spontaneous emission; sputter etching; GaAs; GaAs microdisks; GaAs-AlAs; GaAs-AlAs micropillars; microdisk fabrication; microdisks; micropillars; optical quality; quantum boxes; reactive ion etching; strong Purcell effect; two-step wet etching; Absorption; Atmospheric measurements; Detectors; Energy consumption; Laser radar; NASA; Noise reduction; Optical receivers; Signal detection; Telescopes;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834542
