Lift-off and rapid processing of 10 /spl mu/m thick single-crystal LiNbO/sub 3/ films

Author

Radojevic, A.M. ; Levy, M. ; Osgood, R.M. ; Kumar, Ajit ; Bakhru, Hassaram

Author_Institution

Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA

fYear

1999

fDate

28-28 May 1999

Firstpage

530

Lastpage

531

Abstract

Summary form only given. The recent development of a novel crystal ion slicing technique (CIS) has made it possible to obtain high-quality single-crystal LiNbO/sub 3/ micron-thick films for heterogeneous integration of optical systems. These films can be integrated onto planar substrates based on technologically important materials systems [e.g. semiconductor] otherwise incompatible with single-crystal LiNbO/sub 3/. The technique employs the formation and subsequent preferential etching of a buried damage sacrificial layer obtained by implanting energetic He/sup +/. We report on a technique for rapid fabrication of the single-crystal LiNbO/sub 3/ films and the second harmonic generation (SHG) in the freestanding films. A bulk LiNbO/sub 3/ crystal phase-matched (PM) for SHG at 1.55 /spl mu/m is cut from a z-poled single crystal.

Keywords

etching; ion implantation; lithium compounds; optical fabrication; optical films; optical harmonic generation; optical phase matching; photorefractive materials; 1.55 mum; 10 mum; He; LiNbO/sub 3/; LiNbO/sub 3/ films; buried damage sacrificial layer; crystal ion slicing technique; freestanding films; heterogeneous integration; high-quality single-crystal LiNbO/sub 3/ micron-thick films; lift-off; optical systems; planar substrates; preferential etching; rapid fabrication; rapid processing; second harmonic generation; semiconductor; single-crystal LiNbO/sub 3/ films; technologically important materials systems; thick single-crystal LiNbO/sub 3/ films; z-poled single crystal; Computational Intelligence Society; Crystalline materials; Integrated optics; Nonlinear optics; Optical films; Optical harmonic generation; Optical materials; Particle beam optics; Semiconductor films; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-595-1

Type

conf

DOI

10.1109/CLEO.1999.834552

Filename

834552