DocumentCode
1877977
Title
Self Assembled Monolayer Patterning Using Capillary Force Lithography
Author
Wong, Ieong ; Ho, Chih-Ming
Author_Institution
Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, USA
fYear
2006
fDate
2006
Firstpage
558
Lastpage
561
Abstract
A high performance, high throughput, low cost, and simple technique for patterning self-assembled monolayer (SAM) is successfully demonstrated in this report. Capillary force lithography is employed to generate micro features of protein resistant poly (ethylene glycol) (PEG) self-assembled monolayer on Si/SiO2 substrate for accurate protein patterning. The monolayer shows significant reduction, > 99%, of nonspecific protein adsorption compared to bare Si/SiO2 substrate. Large area, in the order of centimeter, of high-density array (500 × 500) of 2 µ m features can be resolved with high fidelity. This method alleviates the difficulties and complexities in SAM patterning using micro contact printing and photolithography. To our knowledge, this is the first demonstration of capillary force lithography for patterning self-assembled monolayers.
Keywords
Chemistry; Costs; Gold; Immune system; Lithography; Microstructure; Polymers; Proteins; Self-assembly; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627860
Filename
1627860
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