• DocumentCode
    1877977
  • Title

    Self Assembled Monolayer Patterning Using Capillary Force Lithography

  • Author

    Wong, Ieong ; Ho, Chih-Ming

  • Author_Institution
    Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, USA
  • fYear
    2006
  • fDate
    2006
  • Firstpage
    558
  • Lastpage
    561
  • Abstract
    A high performance, high throughput, low cost, and simple technique for patterning self-assembled monolayer (SAM) is successfully demonstrated in this report. Capillary force lithography is employed to generate micro features of protein resistant poly (ethylene glycol) (PEG) self-assembled monolayer on Si/SiO2substrate for accurate protein patterning. The monolayer shows significant reduction, > 99%, of nonspecific protein adsorption compared to bare Si/SiO2substrate. Large area, in the order of centimeter, of high-density array (500 × 500) of 2 µ m features can be resolved with high fidelity. This method alleviates the difficulties and complexities in SAM patterning using micro contact printing and photolithography. To our knowledge, this is the first demonstration of capillary force lithography for patterning self-assembled monolayers.
  • Keywords
    Chemistry; Costs; Gold; Immune system; Lithography; Microstructure; Polymers; Proteins; Self-assembly; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
  • Conference_Location
    Istanbul, Turkey
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-9475-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2006.1627860
  • Filename
    1627860