A High-Q Length-Extensional Bulk-Modemass Sensor with Annexed Sensing Platforms

This paper presents a length-extensional bulk-mode mass sensor with annexed sensing platforms and on-chip integrated capacitive transducers. The utilization of the bulk-mode vibrations of a resonant microstructure enables higher mass sensitivity at the micro-scale and high quality factor (Q) in air. Besides overcoming technical issues inherent with cantilever-based mass sensors, the annexed sensing platforms cover a large range of mass sensitivity within a single sensor-array chip. The measured highest mass sensitivity of this device is 215Hz/pg operating at 13MHz with a Q~ 4,000 in air.