DocumentCode
1879189
Title
A Planar 3 DOF Sample Manipulator for Nano-Scale Characterization
Author
de Jong, B.R. ; Brouwer, D.M. ; Jansen, H.V. ; de Boer, M.J. ; Lammertink, T.G. ; Stramigioli, S. ; Krijnen, G.J.M.
Author_Institution
MESA+ Institute for Nanotechnology, University of Twente, The Netherlands
fYear
2006
fDate
2006
Firstpage
750
Lastpage
753
Abstract
We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ± 9 µ m) as well as rotation about the z-axis (maximum of ± 2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.
Keywords
Actuators; Fasteners; Kinematics; Magnetic force microscopy; Manipulators; Power system modeling; Robust stability; Scanning electron microscopy; Thermal stability; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627908
Filename
1627908
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