Title :
A Planar 3 DOF Sample Manipulator for Nano-Scale Characterization
Author :
de Jong, B.R. ; Brouwer, D.M. ; Jansen, H.V. ; de Boer, M.J. ; Lammertink, T.G. ; Stramigioli, S. ; Krijnen, G.J.M.
Author_Institution :
MESA+ Institute for Nanotechnology, University of Twente, The Netherlands
Abstract :
We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ± 9 µ m) as well as rotation about the z-axis (maximum of ± 2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.
Keywords :
Actuators; Fasteners; Kinematics; Magnetic force microscopy; Manipulators; Power system modeling; Robust stability; Scanning electron microscopy; Thermal stability; Transmission electron microscopy;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627908
