Title :
Analysis and Experiment of Diaphragm Deflection By a Shear Mode PZT Actuator in Microfluidic Application
Author :
Chen, Shih-Chang ; Cheng, Chiang-Ho ; Lin, Yi-Cheng
Author_Institution :
National Changhua University of Education, TAIWAN
Abstract :
A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector.
Keywords :
Actuators; Bonding forces; Microfluidics; Micropumps; Microstructure; Polarization; Pumps; Silicon; Titanium compounds; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627911
