A Novel Elastomer Membrane Micropump with Embedded Coils for Off-Chip Pumping Applications

This paper reports on the implementation of an improved electromagnetic membrane micropump for off-chip operation. Several advantages including small size, localized pumping, programmability, large pumping volume, and good time stability can be found in the proposed design. The experimental results reveal the maximum displacement was up to 47.5μm, which is equivalent to a pumping volume larger than 2μL. The pressure can be maintained for at least 30 minutes. The result of reliability test shows that the displacement deviations could remain within 7% after 24,000 cycles’ operation.