DocumentCode
1879349
Title
A Novel Coil-Less Lorentz Force 2D Scanning Mirror Using Eddy Current
Author
Yang, Hsueh-An ; Fang, Weileun
Author_Institution
Power Mechanical Engineering Dept., National Tsing Hua University, Taiwan
fYear
2006
fDate
2006
Firstpage
774
Lastpage
777
Abstract
This paper reports a novel micro scanning mirror driven by coil-less Lorentz force using eddy current. The eddy current is easily induced in ferromagnetic material like Nickel by solenoid. Thus, the complicated coil routing and insulation layer deposition for current is prevented. Moreover, the fabrication is simplified and easy to integrate with micromachining and CMOS processes. In application, this study demonstrated a bulk micromachined 2D scanning mirror with 20 mechanical scan angles when operated at 100mV and 0.016mA.
Keywords
Coils; Eddy currents; Fabrication; Insulation; Lorentz covariance; Magnetic materials; Mirrors; Nickel; Routing; Solenoids;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location
Istanbul, Turkey
ISSN
1084-6999
Print_ISBN
0-7803-9475-5
Type
conf
DOI
10.1109/MEMSYS.2006.1627914
Filename
1627914
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