Title :
A Novel Coil-Less Lorentz Force 2D Scanning Mirror Using Eddy Current
Author :
Yang, Hsueh-An ; Fang, Weileun
Author_Institution :
Power Mechanical Engineering Dept., National Tsing Hua University, Taiwan
Abstract :
This paper reports a novel micro scanning mirror driven by coil-less Lorentz force using eddy current. The eddy current is easily induced in ferromagnetic material like Nickel by solenoid. Thus, the complicated coil routing and insulation layer deposition for current is prevented. Moreover, the fabrication is simplified and easy to integrate with micromachining and CMOS processes. In application, this study demonstrated a bulk micromachined 2D scanning mirror with 20 mechanical scan angles when operated at 100mV and 0.016mA.
Keywords :
Coils; Eddy currents; Fabrication; Insulation; Lorentz covariance; Magnetic materials; Mirrors; Nickel; Routing; Solenoids;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627914
