Peristaltic PDMS Pump with Perfect Dynamic Valves for Both Gas and Liquid

This paper presents for the first time experimental results on the peristaltic PDMS pump with perfect dynamic valves for both gas and liquid. Micropump consists of the three peristaltic-type actuators and the micro channel connecting with chambers and the inlet/outlet port. Micropump is fabricated by SU8 mold process and the two-step curing process for the irreversible bonding of PDMS layers. The diameter and the thickness of the actuator diaphragm are 1 mm and 98 μm, respectively. The total size of micro pump is about 5 mm x 5.5 mm. The dynamic gas and liquid valve actions of the single actuator are observed to verify effect of the fluidic mass and viscosity of the working fluid. Perfect peristaltic motions and robust pumping actions of the micro pump are confirmed by the flowrate test of micropump with the air and the ink.