Pressure-Independent Micropump with Piezoelectric Valves for Low Flow Drug Delivery Systems

We present - for the first time - a novel design of a micropump which enables a backpressure-independent flow rate up to 20 kPa within the low flow regime required for drug delivery systems. Our concept, based on two piezoelectrically actuated diaphragms, allows an accurate dosing in the range of 1 - 50 µ l/min with freely programmable release profiles and offers the potential to minimize chip size and power consumption in comparison to 3-actuator peristaltic micropumps. The stroke volume is adjustable between 50 - 200 nl by means of voltage control which enables a high resolution volumetric dosing. Within the relevant frequency range below 2 Hz the flow rate is proportional to the frequency. Our design also excels in its comparably simple and robust 2-layer fabrication process.