Title :
Consideration for a New Micromachined Accelerometer Capacitive Interface Based on Switched Flip-Flop Circuit
Author :
Kollár, Martin ; Michaeli, Linus
Author_Institution :
Dept. of Electr. Eng. & Meas., Tech. Univ. of Kosice
Abstract :
In this paper, a new interface concept is described for the design of a closed-loop accelerometer based upon micromachined capacitive sensing element. In comparison to the ordinary approaches, the new interface only consists of a switched flip-flop circuit. The interface circuit is low in component count, which makes it particularly suitable for prototype evaluation. The theoretical considerations agree well with the simulation results in Matlab SIMULINK and experimental results
Keywords :
accelerometers; capacitive sensors; flip-flops; micromachining; microsensors; switching circuits; Matlab SIMULINK; capacitive interface; closed-loop accelerometer; interface circuit; micromachined accelerometer; micromachined capacitive sensing element; sigma-delta modulator; switched flip-flop circuit; Accelerometers; Delta-sigma modulation; Electric shock; Electrodes; Electrostatics; Flip-flops; Force feedback; Prototypes; Switching circuits; Voltage; Micromachined accelerometer; interface circuit; sigma-delta modulator; switched flip-flop;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE
Conference_Location :
Sorrento
Print_ISBN :
0-7803-9359-7
Electronic_ISBN :
1091-5281
DOI :
10.1109/IMTC.2006.328553
