Title :
Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves
Author :
Saruta, Kunihiko ; Kasai, Hiroto ; Nishida, Masato ; Yamaguchi, Masanari ; Ito, Yasuyuki ; Yamashita, Keitaro ; Taguchi, Ayumu ; Oniki, Kazunao ; Tamada, Hitoshi
Author_Institution :
Semiconductor Business Unit, Sony Corporation, 4-14-1, Asahi-cho, Atsugi-shi, Kanagawa 243-0014, Japan, Tel: +81-46-230-5175, FAX: +81-46-230-5945, Email: Kunihiko.Saruta@jp.sony.com
Abstract :
The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in only one direction [ 2], and achieved a jump in contrast from 3000:1 to 10000:1. Moreover, we achieved a 55 to 70% improvement in optical efficiency due to nanometer-order control of blazed GLV ribbon. These technologies were applied to the 2005-inch theater system “ GxL™ Laser Dream Theater” [ 3, 4].
Keywords :
Displays; Gratings; Lighting control; Micromechanical devices; Optical control; Optical diffraction; Optical distortion; Optical modulation; Silicon compounds; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627931
