Nanometer-Order Control of MEMS Ribbons for Blazed Grating Light Valves

Author

Saruta, Kunihiko ; Kasai, Hiroto ; Nishida, Masato ; Yamaguchi, Masanari ; Ito, Yasuyuki ; Yamashita, Keitaro ; Taguchi, Ayumu ; Oniki, Kazunao ; Tamada, Hitoshi

Author_Institution

Semiconductor Business Unit, Sony Corporation, 4-14-1, Asahi-cho, Atsugi-shi, Kanagawa 243-0014, Japan, Tel: +81-46-230-5175, FAX: +81-46-230-5945, Email: Kunihiko.Saruta@jp.sony.com

fYear

2006

fDate

2006

Firstpage

842

Lastpage

845

Abstract

The performance of grating light valve (GLV™) chips can be increased by optimizing their ribbon structures [ 1]. A GLV is a one-dimensional light modulator using diffraction that can be applied to a high definition display by scanning the second dimension. We applied blazed GLV, which diffracts in only one direction [ 2], and achieved a jump in contrast from 3000:1 to 10000:1. Moreover, we achieved a 55 to 70% improvement in optical efficiency due to nanometer-order control of blazed GLV ribbon. These technologies were applied to the 2005-inch theater system “ GxL™ Laser Dream Theater” [ 3, 4].

Keywords

Displays; Gratings; Lighting control; Micromechanical devices; Optical control; Optical diffraction; Optical distortion; Optical modulation; Silicon compounds; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

Conference_Location

Istanbul, Turkey

ISSN

1084-6999

Print_ISBN

0-7803-9475-5

Type

conf

DOI

10.1109/MEMSYS.2006.1627931

Filename

1627931