Title :
Near-field scanning microwave microscopy: measuring local microwave properties and electric field distributions
Author :
Feenstra, B.J. ; Vlahacos, C.P. ; Thanawalla, A.S. ; Steinhauer, D.E. ; Dutta, S.K. ; Wellstood, F.C. ; Anlage, S.M.
Author_Institution :
Dept. of Phys., Maryland Univ., College Park, MD, USA
Abstract :
We describe the near-field scanning microwave microscopy of microwave devices on a length scale much smaller than the wavelength used for imaging. Our microscope can be operated in two possible configurations, allowing a quantitative study of either material properties or local electric fields.
Keywords :
electric field measurement; microwave measurement; scanning probe microscopy; local electric field distribution; local microwave properties; measurement technique; microwave device; near-field scanning microwave microscopy; Atomic force microscopy; Coaxial components; Electric variables measurement; Material properties; Microwave devices; Microwave measurements; Power transmission lines; Probes; Resonance; Superconducting microwave devices;
Conference_Titel :
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4471-5
DOI :
10.1109/MWSYM.1998.705152
