Evaluation of Touch Trigger Probe Measurement Uncertainty Using FEA

Evaluation of measurement uncertainty is an essential subject in dimensional measurement. It has also become a dominant issue in coordinate measuring machine (CMM) even though its machine performance has been well accepted by many users. CMM probes, especially touch trigger probes which are commonly used, have been acknowledged as a key error source, largely due to pre-travel variations. The probe errors result in large measurement uncertainty in CMM measurement. Various methods have been introduced to estimate measurement uncertainty, but they tend to be time consuming and necessarily require a large amount of experimental data for analyzing the uncertainty. This paper presents the method of evaluation of CMM probe uncertainty using FEA modeling. It is started with the investigation of the behavior of probe by recording stylus displacement with vary triggering force. Then, those displacement results will be analyzed with sensitivity analysis technique to estimate the uncertainty of recorded results