Title :
Proceedings of IEEE International Conference on Microelectronic Test Structures
Abstract :
Presents the cover from the proceedings of this conference.
Keywords :
circuit reliability; integrated circuit testing; monolithic integrated circuits; semiconductor device models; semiconductor device testing; semiconductor process modelling; capacitance measurements; dark current prediction; defects; dimensional measurement; homogeneous contamination; manufacturability; metrology standards; parameter extraction; photoemission characteristics; process characterization; reliability; testing; thermal measurements; yield;
Conference_Titel :
Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
Conference_Location :
Sitges, Spain
Print_ISBN :
0-7803-0857-3
DOI :
10.1109/ICMTS.1993.292903
