Title : 
MHS2001. Proceedings of 2001 International Symposium on Micromechatronics and Human Science (Cat. No.01TH8583)
         
        
        
        
            Abstract : 
The following topics are dealt with: microfabrication and property; microrobots; microcomponents and microdevices; micro/nano-positioning; measurement and system control; micro/nano-manipulation and control
         
        
            Keywords : 
mechatronics; micromechanical devices; microrobots; microcomponents; microdevices; micromechatronics; microrobots;
         
        
        
        
            Conference_Titel : 
Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on
         
        
            Conference_Location : 
Nagoya, Japan
         
        
            Print_ISBN : 
0-7803-7190-9
         
        
        
            DOI : 
10.1109/MHS.2001.965211