Title :
A model to predict the degradation of silicon dioxide films in mos structures
Author :
Samanta, Piyas ; Sarkar, C.K.
fDate :
March 15-17, 2005
Keywords :
Degradation; Dielectric breakdown; Electron traps; Impact ionization; Predictive models; Semiconductor films; Silicon compounds; Thermal stresses; Tunneling; Voltage;
Conference_Titel :
Radio Science Conference, 2005. NRSC 2005. Proceedings of the Twenty-Second National
Print_ISBN :
977-503183-4
DOI :
10.1109/NRSC.2005.193981