Sensitivity analysis for a piezoresistive rotary movement micro gyroscope

Author

Nakano, Satoshi ; Toriyama, Toshiyuki ; Sugiyama, Susumu

Author_Institution

Fac. of Sci. & Eng., Ritsumeikan Univ., Shiga, Japan

fYear

2001

fDate

2001

Firstpage

87

Lastpage

92

Abstract

Sensitivity of a piezoresistive rotary movement micro gyroscope was investigated. The gyroscope consists of a folded cross silicon beam with piezoresistors, and pillars at the center of the cross beam. Four electromagnets induce the rotary movement of the pillars. The micro gyroscope has the advantage of sensing angular rate around the X- and Y-axes. The micro gyroscope can cancel acceleration using the pillars that were fixed on both sides of the beam, and the locations of the piezoresistors. Sensitivity of the micro gyroscope was estimated, taking account of the fracture strength of the folded cross silicon beam. The sensitivity of the micro gyroscope that was obtained by the analysis was 4.0 nV /deg/s

Keywords

Coriolis force; angular velocity measurement; finite element analysis; gyroscopes; microsensors; piezoresistive devices; sensitivity analysis; angular rate; electromagnets; fracture strength; piezoresistive rotary movement micro gyroscope; piezoresistors; sensitivity analysis; Acceleration; Compressive stress; Electromagnets; Gyroscopes; Piezoresistance; Piezoresistive devices; Power engineering and energy; Sensitivity analysis; Silicon; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-7190-9

Type

conf

DOI

10.1109/MHS.2001.965227

Filename

965227