Title :
Micro force-moment sensor with six-degree of freedom
Author :
Dao, Dzung Viet ; Toriyama, Toshiyuki ; Wells, John ; Sugiyama, Susumu
Author_Institution :
Fac. of Sci. & Eng., Ritsumeikan Univ., Shiga, Japan
Abstract :
This paper describes the design concept, theoretical investigation and fabrication process of a micro multi-axis force-moment sensor utilizing the piezoresistive effect in silicon. The purpose of the sensor development is to measure the force and moment acting on boundary particles in a turbulent liquid flow. The sensor was designed to independently detect 3 components of force and 3 components of moment in three orthogonal directions. Conventional type and four-terminal piezoresistors have been combined in a single sensing chip
Keywords :
force sensors; microsensors; boundary particles; flow. sensor; force sensors; micro force sensors; micro multi-axis force-moment sensor; piezoresistive effect; sensor development; turbulent liquid flow; Fabrication; Fluid flow; Force measurement; Force sensors; Particle measurements; Piezoresistance; Piezoresistive devices; Semiconductor device measurement; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-7190-9
DOI :
10.1109/MHS.2001.965228
