Micro force-moment sensor with six-degree of freedom

Author

Dao, Dzung Viet ; Toriyama, Toshiyuki ; Wells, John ; Sugiyama, Susumu

Author_Institution

Fac. of Sci. & Eng., Ritsumeikan Univ., Shiga, Japan

fYear

2001

fDate

2001

Firstpage

93

Lastpage

98

Abstract

This paper describes the design concept, theoretical investigation and fabrication process of a micro multi-axis force-moment sensor utilizing the piezoresistive effect in silicon. The purpose of the sensor development is to measure the force and moment acting on boundary particles in a turbulent liquid flow. The sensor was designed to independently detect 3 components of force and 3 components of moment in three orthogonal directions. Conventional type and four-terminal piezoresistors have been combined in a single sensing chip

Keywords

force sensors; microsensors; boundary particles; flow. sensor; force sensors; micro force sensors; micro multi-axis force-moment sensor; piezoresistive effect; sensor development; turbulent liquid flow; Fabrication; Fluid flow; Force measurement; Force sensors; Particle measurements; Piezoresistance; Piezoresistive devices; Semiconductor device measurement; Sensor phenomena and characterization; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2001. MHS 2001. Proceedings of 2001 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-7190-9

Type

conf

DOI

10.1109/MHS.2001.965228

Filename

965228