Title :
3D model of micromachined heat flux sensor
Author :
Gridchin, Victor A. ; Lobach, Oleg V. ; Dikareva, Regina P.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk, Russia
Abstract :
In this paper the silicon micromachined heat flux sensor is shown. The full model of a heat flux sensor with the built in heater is presented. Temperature distribution in complex 3D model of heat flux sensor is received. Sensor models with different forms of a heater are described. The comparative analysis of the received results is carried out.
Keywords :
heat measurement; microsensors; temperature distribution; 3D model; micromachined heat flux sensor; temperature distribution; Biomembranes; Conferences; Heating; Helium; MEMS; heat flux sensor; microsystems; numerical modeling;
Conference_Titel :
Actual Problems of Electronic Instrument Engineering (APEIE), 2010 10th International Scientific-Technical Conference on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-8209-2
Electronic_ISBN :
978-1-4244-8210-8
DOI :
10.1109/APEIE.2010.5677349
