DocumentCode :
1884070
Title :
Proceedings International Conference on MEMS, NANO and Smart Systems
fYear :
2003
fDate :
23-23 July 2003
Abstract :
The following topics were dealt: MEMS fabrication; shape memory alloys; laser micromachining for microfluidic, microelectronic and MEMS applications; micromachined needles for drug delivery systems; finite element simulation; magnetically levitated microrobots.
Keywords :
biomedical materials; carbon nanotubes; drug delivery systems; finite element analysis; intelligent materials; intelligent robots; microactuators; microfluidics; micromachining; microrobots; microsensors; nanoparticles; nanowires; shape memory effects; ultrasonic machining; ultrasonic transducers; MEMS applications; MEMS fabrication; conference proceedings; drug delivery systems; finite element simulation; laser micromachining; magnetically levitated microrobots; microelectronic applications; microfluidic applications; micromachined needles; nanoparticles; shape memory alloys; Acoustic materials-processing applications; Finite element methods; Intelligent materials; Machining; Microactuators; Micromachining; Microsensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Conference_Location :
Banff, Alta., Canada
Print_ISBN :
0-7695-1947-4
Type :
conf
DOI :
10.1109/ICMENS.2003.1221955
Filename :
1221955
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1884070
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