Title :
RF MEMS switch for wireless LAN applications
Author :
Lee, Kee-Keun ; Kim, Bruce C.
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Abstract :
Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150 μm × 60 μm × 0.6 μm. The spacing between the top beam and the bottom ground electrode was approximately 1 μm. This switch has low pull-in voltage of 15 V and fast switching speed of 60 μs. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
Keywords :
low-power electronics; microswitches; microwave switches; wireless LAN; 15 V; 30 GHz; RF MEMS switch; double cantilever beam MEMS switch; fast switching; isolation; single actuation electrode; top beam-bottom ground electrode spacing; wireless LAN applications; Contacts; Electrodes; Gold; Low voltage; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Wireless LAN;
Conference_Titel :
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN :
0-7695-1947-4
DOI :
10.1109/ICMENS.2003.1221973
