DocumentCode
1884606
Title
A new class of tunable RF MEMS inductors
Author
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
fYear
2003
fDate
20-23 July 2003
Firstpage
114
Lastpage
115
Abstract
In this paper, we present results from our research on tunable inductors. The tunability is achieved with the use of thermal actuators that control spacing between main and secondary inductor.
Keywords
inductors; micromechanical devices; microwave devices; tuning; main inductor; secondary inductor; spacing control; thermal actuators; tunable RF MEMS inductors; Actuators; Inductance; Inductors; Micromechanical devices; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Substrates; Tunable circuits and devices; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN
0-7695-1947-4
Type
conf
DOI
10.1109/ICMENS.2003.1221976
Filename
1221976
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