Title :
Transition of MEMS technology to nanofabrication
Author :
Jakeway, Stephen C. ; Crabtree, H. John ; Veres, Teodor ; Cameron, Neil S. ; Luesebrink, Helge ; Glinsner, Thomas
Author_Institution :
Micralyne Inc., Edmonton, Alta., Canada
Abstract :
The transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and high-density feature sizes in the nanometer scale. Techniques for fabricating μm-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented.
Keywords :
embossing; microfluidics; micromechanical devices; nanolithography; printing; transfer moulding; ultraviolet lithography; MEMS technology transition; high-density feature size; nanofabrication; nanoimprinting technologies; Embossing; Helium; Micromechanical devices; Nanofabrication; Polymers; Pressure control; Research and development; Temperature control; Temperature sensors; Wafer bonding;
Conference_Titel :
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN :
0-7695-1947-4
DOI :
10.1109/ICMENS.2003.1221977
