DocumentCode
1884673
Title
Monolayer surface coatings solve stiction and drift problems in MEMS
Author
Zhu, Xiaoyang
Author_Institution
MicroSurfaces, Inc.,, Minneapolis, MN, USA
fYear
2003
fDate
20-23 July 2003
Firstpage
128
Lastpage
130
Abstract
This paper reports recent developments in monolayer surface coating process to solve stiction and drift problems in MEMS devices. The chemical strategy for the formation of high density and conformal monolayers is presented, and performance characteristics of these coatings on existing or emerging MEMS products will be discussed. Recent tests on electro-statically actuated micro-mirror devices show that a densely packed monolayer can withstand up to 100 billion cycles of contacts.
Keywords
micromechanical devices; micromirrors; monolayers; stiction; MEMS; chemical strategy; densely packed monolayer; drift problems; electrostatically actuated micromirror devices; monolayer surface coatings; stiction; Coatings; Dielectric constant; Dielectric thin films; Electrostatic actuators; Microelectromechanical devices; Micromechanical devices; Silicon; Stress; Surface charging; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN
0-7695-1947-4
Type
conf
DOI
10.1109/ICMENS.2003.1221979
Filename
1221979
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