• DocumentCode
    1885237
  • Title

    ES4: Fusion of MEMS and circuits

  • Author

    Shigematsu, Satoshi ; Arimoto, Kazutami ; Hagleitner, Christoph

  • Author_Institution
    NTT Electronics, Yokohama, Japan
  • fYear
    2010
  • fDate
    7-11 Feb. 2010
  • Firstpage
    526
  • Lastpage
    527
  • Abstract
    In recent times, the market for sensor applications that use MEMS (accelerator, gas, pressure, etc.) has greatly expanded. In the future, MEMS devices are expected to provide innovations for new chip functions and to enable the “More than Moore” era.
  • Keywords
    Circuit testing; Consumer electronics; Gas detectors; Gyroscopes; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Mirrors; Random access memory; Sensor fusion;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0193-6530
  • Print_ISBN
    978-1-4244-6033-5
  • Type

    conf

  • DOI
    10.1109/ISSCC.2010.5433878
  • Filename
    5433878
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1885237