Title :
A closed-loop SC interface for a ±1.4g accelerometer with 0.33% nonlinearity and 2µg/vHz input noise density
Author :
Yucetas, Mikail ; Salomaa, Jarno ; Kalanti, A. ; Aaltonen, Lasse ; Halonen, Kari
Author_Institution :
Helsinki Univ. of Technol., Espoo, Finland
Abstract :
A closed-loop SC interface for a ±1.4 g accelerometer together with a 1 b SC ΔΣ ADC is implemented in 0.35 μm CMOS. The active area is 2 mm2 and the supply current and voltage are 2.4 mA and 3.6 V, respectively. The SC interface, designed for a sensor element with a high quality factor, allows the resonance peak of the element to be damped in such a way that the ADC remains outside the closed-loop accelerometer.
Keywords :
/spl Delta-/spl Sigma/ modulation; CMOS integrated circuits; Q-factor; accelerometers; analogue-digital conversion; closed loop systems; ΔΣ ADC; CMOS; closed-loop SC interface; closed-loop accelerometer; high quality factor; input noise density; sensor element; Accelerometers; Capacitive sensors; Capacitors; Force feedback; Frequency; Linearity; Q factor; Resonance; Switches; Voltage;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6033-5
DOI :
10.1109/ISSCC.2010.5433899
