DocumentCode :
1886052
Title :
Growth temperature dependence of annealing effect for GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition
Author :
Kawaguchi, M. ; Miyamoto, T. ; Minobe, S. ; Koyama, E. ; Iga, K.
Author_Institution :
P&I Lab., Tokyo Inst. of Technol., Yokohama, Japan
fYear :
2002
fDate :
2002
Firstpage :
237
Lastpage :
240
Abstract :
We have investigated the growth temperature dependence of the optical property change induced by a thermal annealing for a GaInNAs/GaAs quantum well grown by metalorganic chemical vapor deposition. We found that the wavelength blue shift induced by the thermal annealing of GaInNAs strongly depends on the growth temperature. The emission wavelength blue shift significantly decreased at growth temperatures lower than 500°C. The obtained result will be useful for improving the performance of GaInNAs lasers especially for vertical-cavity surface-emitting lasers.
Keywords :
III-V semiconductors; MOCVD; gallium arsenide; gallium compounds; indium compounds; photoluminescence; quantum well lasers; rapid thermal annealing; semiconductor growth; semiconductor quantum wells; spectral line shift; surface emitting lasers; vapour phase epitaxial growth; 500 degC; GaInNAs lasers; GaInNAs-GaAs; GaInNAs/GaAs quantum well; MOCVD; PL peak wavelength; RTA; VCSEL; emission wavelength blue shift; growth temperature dependence; metal organic chemical vapor deposition; optical property change; photoluminescence measurement; surface-emitting lasers; thermal annealing; vertical-cavity SEL; Annealing; Buffer layers; Chemical vapor deposition; Distributed Bragg reflectors; Gallium arsenide; Optical materials; Optical surface waves; Surface emitting lasers; Temperature dependence; Vertical cavity surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials Conference, 2002. IPRM. 14th
ISSN :
1092-8669
Print_ISBN :
0-7803-7320-0
Type :
conf
DOI :
10.1109/ICIPRM.2002.1014340
Filename :
1014340
Link To Document :
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