DocumentCode :
1886856
Title :
Fracture, delamination, and buckling of elastic thin films on compliant substrates
Author :
Mei, Haixia ; Pang, Yaoyu ; Hyuk Im, Se ; Huang, Rui
Author_Institution :
Dept. of Aerosp. Eng. & Eng. Mech., Univ. of Texas at Austin, Austin, TX
fYear :
2008
fDate :
28-31 May 2008
Firstpage :
762
Lastpage :
769
Abstract :
A series of studies have been conducted for mechanical behavior of elastic thin films on compliant substrates. Under tension, the film may fracture by growing channel cracks. The driving force for channel cracking (i.e., the energy release rate) increases significantly for compliant substrates. Moreover, channel cracking may be accompanied by interfacial delamination. For a film on a relatively compliant substrate, a critical interface toughness is predicted, which separates stable and unstable delamination. For a film on a relatively stiff substrate, however, a channel crack grows with no delamination when the interface toughness is greater than a critical value. An effective energy release rate for the steady-state growth of a channel crack is defined to account for the influence of interfacial delamination on both the fracture driving force and the resistance, which can be significantly higher than the energy release rate assuming no delamination. Alternatively, when the film is under compression, it tends to buckle. Two buckling modes have been observed, one with interfacial delamination (i.e., buckle-delamination) and the other without delamination (i.e., wrinkling). By comparing the critical stresses for the onset of buckling, we give a criterion for the selection of the buckling modes, which depends on the stiffness ratio between the film and the substrate as well as the interface defects. A general conclusion from these studies is that, whether tension or compression, the interfacial properties are critical in controlling the morphology and failure of elastic thin films on compliant substrates.
Keywords :
buckling; delamination; fracture; interface roughness; thin films; buckling; channel cracking; compliant substrate; critical interface toughness; elastic thin film; fracture; interface defect; interfacial delamination; Biological materials; Biomedical materials; Buffer layers; Delamination; Dielectric materials; Microelectronics; Steady-state; Stress; Substrates; Transistors; buckling; delamination; fracture; interface;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal and Thermomechanical Phenomena in Electronic Systems, 2008. ITHERM 2008. 11th Intersociety Conference on
Conference_Location :
Orlando, FL
ISSN :
1087-9870
Print_ISBN :
978-1-4244-1700-1
Electronic_ISBN :
1087-9870
Type :
conf
DOI :
10.1109/ITHERM.2008.4544345
Filename :
4544345
Link To Document :
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