DocumentCode :
1887437
Title :
Analysis of surface structures of a metal target from multi-pulse KrF laser ablation
Author :
Ang, L.K. ; Lau, Y.Y. ; Gilgenbach, Ronald M. ; Spindler, H.L. ; Kovaleski, Scott D. ; Lash, J.S.
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
fYear :
1997
fDate :
19-22 May 1997
Firstpage :
232
Abstract :
Summary form only given, as follows. Aluminum targets were ablated by focusing a KrF excimer laser (248 nm, 40 ns, <1.2 J) down to a spot size of 0.05 cm/sup 2/ with a fluence of approximately 4.9 J/cm/sup 2/. After a few tens of pulses, surface irregularities (corrugations and pits) progressively emerge, with size 1-100 /spl mu/m which is much larger than the laser wavelength. Such large scale surface roughness causes multiple reflections of the laser light, and may increase the absorption coefficient over a pristine, flat surface by an order of magnitude. Thus, as much as 16% (at room temperature) of the power of the KrF laser may be absorbed by the aluminum target. Scaling laws on the enhanced absorption due to surface roughness are derived. We have also examined various physical mechanisms that lead to these large scale surface structures. The most promising candidate appears to be hydrodynamic instabilities of intense plasma formation near to the surface. A model is developed which yields the growth rate as a function of wave number, thickness of molten layer, energy density and spatial extent of the surface plasma, and the thermophysical properties of the irradiated material. We found that there is a threshold of plasma energy density for the occurrence of the instability.
Keywords :
absorption coefficients; aluminium; laser ablation; plasma instability; plasma production by laser; surface structure; 1.2 J; 248 nm; Al; Al targets; absorption coefficient; energy density; hydrodynamic instabilities; intense plasma formation; irradiated material; laser light multiple reflections; metal target; model; molten layer thickness; multi-pulse KrF laser ablation; plasma energy density; scale surface roughness; scaling laws; surface irregularities; surface structures; thermophysical properties; Aluminum; Corrugated surfaces; Plasma density; Plasma materials processing; Plasma properties; Plasma waves; Rough surfaces; Surface emitting lasers; Surface roughness; Surface structures;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-3990-8
Type :
conf
DOI :
10.1109/PLASMA.1997.604955
Filename :
604955
Link To Document :
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