Title :
Field emission of sheet electron beam from single layer graphene
Author :
Jinbiao Yang ; Linchuan Song ; Shan Yang ; Jianlong Liu ; Baoqing Zeng
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Vacuum Electron., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
Field emitter of sheet electron beam is made by transferring chemical vapor deposition (CVD)-graphene films onto SiO2/Si substrate. Field emission of sheet electron beam is from the edge of graphene/SiO2/Si. These sheet electron beams would be useful to vacuum electron devices and electron beam lithograph. Besides good emission current, graphene films electron beam is also tolerable with excellent emission stability. With good emission properties, graphene films electron beam bring application insight.
Keywords :
chemical vapour deposition; electron field emission; graphene; thin films; C; CVD; SiO2-Si; SiO2-Si substrate; chemical vapor deposition-graphene films; electron beam lithography; emission current; emission stability; sheet electron beam field emission; sheet electron beam field emitter; single layer graphene; vacuum electron devices; Copper; Electron beams; Graphene; Optical films; Silicon; Substrates; electron beam; field emission; graphene;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2015 28th International
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-9356-0
DOI :
10.1109/IVNC.2015.7225558