In-place synthesis of metallic nanowire arrays for the use in an ionization vacuum gauge

Author

Roustaie, F. ; Quednau, S. ; Dassinger, F. ; Schlaak, H.F. ; Lotz, M. ; Wilfert, S.

Author_Institution

Inst. of Electromech. Design (EMK), Tech. Univ. Darmstadt, Darmstadt, Germany

fYear

2015

fDate

13-17 July 2015

Firstpage

176

Lastpage

177

Abstract

An in-place synthesis process for nanowires is used to fabricate a customized field emitter array for the use as a non-thermal electron source in an ionization gauge. The fabrication was further expanded to metallic nanocones with a density of 1.6 × 10⁶ cm^-2 using optimized deposition of the cones on predefined electrodes. This method can make the wide area of the predefined electrodes enclosed with nanowires with less standard deviation in their height.

Keywords

electrochemical electrodes; electron sources; field emitter arrays; ionisation; nanofabrication; nanosensors; nanowires; sensor arrays; cone deposition; customized field emitter array; electrode; in-place synthesis process; ionization vacuum gauge; metallic nanocone; metallic nanowire array; nanofabrication; nonthermal electron source; Cathodes; Fabrication; Gold; Polymers; Substrates; Wires; field emission; field emitter array; ion gauge; metallic nanocones; metallic nanowires; vacuum gauge;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2015 28th International

Conference_Location

Guangzhou

Print_ISBN

978-1-4673-9356-0

Type

conf

DOI

10.1109/IVNC.2015.7225571

Filename

7225571