Title :
CNT field emission based ultra-high vacuum measurements
Author :
Jian Zhang ; Yangyang Zhao ; Yongjun Cheng ; Detian Li ; Changkun Dong
Author_Institution :
Inst. of Micro-nano Struct. & Optoelectron., Wenzhou Univ., Wenzhou, China
Abstract :
The ultra-high vacuum measurement properties are investigated on the Leybold extract gauge based on carbon nanotube (CNT) field emission. The CNT field emitters are grown directly on catalytic substrates with strong nanotube adhesion, excellent emission properties, and low outgassing effect. The CNT gauge responds linearly to nitrogen pressure in the range from 10-6 to 10-11 Torr with sensitivities of about 3 torr-1, under the anode current of 46μA and the anode votagle of 430V. The measurement of pressure down to 10-12 torr is expected under higher cathode current and the addition of a shielding electrode to constrain the electron energy in order to improve the gas ionization efficiency and minimize the EDS & x-ray effects.
Keywords :
carbon nanotubes; cathodes; electron field emission; gauges; nitrogen; vacuum measurement; vacuum microelectronics; C; CNT field emission; CNT field emitters; CNT gauge; Leybold extract gauge; N; X-ray effects; anode current; anode voltage; carbon nanotube; cathode current; electron energy; emission properties; gas ionization efficiency; nanotube adhesion; nitrogen pressure; outgassing effect; shielding electrode; ultra-high vacuum measurement properties; Anodes; Carbon nanotubes; Current measurement; Electron sources; Ionization; Nitrogen; Vacuum technology; carbon nanotube; field emission; ionization gauge; ultra-high vaccum;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2015 28th International
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-9356-0
DOI :
10.1109/IVNC.2015.7225574
