Title :
Electron beam forming in MEMS-type electron gun
Author :
Krysztof, M. ; Grzebyk, T. ; Gorecka-Drzazga, A. ; Dziuban, J.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In this paper we discuss first realization and preliminary parameters of the electronoptics MEMS column equipped with a field-emitting electron gun and an Einzel lens. The column is made in a form of the sandwiched silicon stack. Silicon elements are deep wet micromachined and placed in a polymer 3D printed holder. Cathode is made of carbon nanotubes deposited by use of the electrophoretic process onto the bottom silicon part of the column.
Keywords :
carbon nanotubes; electron field emission; electron guns; electron microscopy; electron optics; micromachining; micromechanical devices; Einzel lens; MEMS-type electron gun; carbon nanotubes; electron beamforming; electronoptics MEMS; electrophoretic process; field-emitting electron gun; polymer 3D printed holder; sandwiched silicon stack; wet micromachined; Electrodes; Electron beams; Focusing; Lenses; Logic gates; Microscopy; Silicon; Einzel lens; MEMS; carbon nanotubes; electron gun; field emission;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2015 28th International
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4673-9356-0
DOI :
10.1109/IVNC.2015.7225580
