Title :
Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications
Author :
Chen, Fan ; Spencer, Matt ; Nathanael, Rhesa ; Chengcheng Wang ; Fariborzi, Hossein ; Gupta, Arpan ; Hei Kam ; Pott, Vincent ; Jaeseok Jeon ; Tsu-Jae King Liu ; Markovic, Dejan ; Stojanovic, V. ; Alon, Elad
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.
Keywords :
VLSI; circuit testing; microswitches; I/O function; VLSI application; carry-generation block; integrated microelectromechanical switch circuits; logic function; memory function; monolithic integration; test chip; timing function; Circuit testing; Inverters; Logic circuits; Logic testing; Monolithic integrated circuits; Oscillators; Switches; Switching circuits; Timing; Very large scale integration;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-6033-5
DOI :
10.1109/ISSCC.2010.5434010
