Title :
Absolute Interferometric Measurement of Differential Displacements
Author_Institution :
Dipt. di Elettronica per l´´Automazione, Univ. degli Studi di Brescia
Abstract :
The paper describes an interferometric technique suitable for the absolute measurement of displacements with nanometer resolution over a range up to few hundreds of micrometers. The displacement pick-ups are linked with optical fibers. The laser source is a VCSEL operated with a continuous wavelength modulation. The measurement is obtained combining absolute frequency-based measurements with phase-based measurements. The uncertainty analysis shows the conditions that must be fulfilled to get the best results. To build a compact sensors it is proposed the use of a DOE as a beam splitter and fiber coupler
Keywords :
diffractive optical elements; displacement measurement; light interferometry; optical beam splitters; optical fibre couplers; surface emitting lasers; VCSEL; absolute interferometric measurement; beam splitter; continuous wavelength modulation; diffractive optical elements; displacement measurement; fiber coupler; optical fiber; pressure transducer; uncertainty analysis; Displacement measurement; Fiber lasers; Frequency measurement; Optical fiber couplers; Optical fibers; Optical interferometry; Phase measurement; US Department of Energy; Vertical cavity surface emitting lasers; Wavelength measurement; absolute interferometer; interferometric measurement; optical fiber; pressure transducer;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE
Conference_Location :
Sorrento
Print_ISBN :
0-7803-9359-7
Electronic_ISBN :
1091-5281
DOI :
10.1109/IMTC.2006.328620
