Absolute Interferometric Measurement of Differential Displacements

Author

Minoni, Umberto

Author_Institution

Dipt. di Elettronica per l´´Automazione, Univ. degli Studi di Brescia

fYear

2006

fDate

24-27 April 2006

Firstpage

2359

Lastpage

2363

Abstract

The paper describes an interferometric technique suitable for the absolute measurement of displacements with nanometer resolution over a range up to few hundreds of micrometers. The displacement pick-ups are linked with optical fibers. The laser source is a VCSEL operated with a continuous wavelength modulation. The measurement is obtained combining absolute frequency-based measurements with phase-based measurements. The uncertainty analysis shows the conditions that must be fulfilled to get the best results. To build a compact sensors it is proposed the use of a DOE as a beam splitter and fiber coupler

Keywords

diffractive optical elements; displacement measurement; light interferometry; optical beam splitters; optical fibre couplers; surface emitting lasers; VCSEL; absolute interferometric measurement; beam splitter; continuous wavelength modulation; diffractive optical elements; displacement measurement; fiber coupler; optical fiber; pressure transducer; uncertainty analysis; Displacement measurement; Fiber lasers; Frequency measurement; Optical fiber couplers; Optical fibers; Optical interferometry; Phase measurement; US Department of Energy; Vertical cavity surface emitting lasers; Wavelength measurement; absolute interferometer; interferometric measurement; optical fiber; pressure transducer;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE

Conference_Location

Sorrento

ISSN

1091-5281

Print_ISBN

0-7803-9359-7

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2006.328620

Filename

4124782