Modeling and Coordinates-Decoupling of Multidimensional Precision Optical Adjusting Mount

Coordinates-coupling always exists within each adjusting freedom of multidimensional precision optical adjusting mount. As quantifying and compensating the coupling relation remains a problem; in the actual alignment of optical system, coordinate-coupling is often ignored. In this paper, by mathematical modeling and simulating, we analyze the coupling relations of each adjusting freedom. And through decomposed transformation of each adjusting freedom, the coupling relation between each adjusting freedom is compensated and corrected. The error between expected optical adjusting value and actual mechanical adjusting motion is erased, and more accurate optical adjusting is achieved.