DocumentCode
1889954
Title
Approximate, semi-implicit calculation of 3D electrostatic potential in a self-consistent plasma simulation
Author
Keiter, Eric R. ; Kushner, Mark J.
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
fYear
1997
fDate
19-22 May 1997
Firstpage
238
Lastpage
239
Abstract
Summary form only given. Numerical modeling of low pressure plasma reactors is subject to numerous time step constraints, and among the most restrictive of these is the dielectric relaxation time. In recent years, semi-implicit flux-correction techniques have allowed plasma modelers to loosen the dielectric relaxation time step restriction. However, since these simulations do solve a form of Poisson´s equation, they still have a restriction on time step based on a modified, albeit less restrictive, dielectric relaxation time. For some parameter spaces this is acceptable, but for very large scale simulations (for example in three dimensions) and for simulations of systems having long time scales, obtaining a longer time step is crucial. We present a method for obtaining an approximate electrostatic potential which has no dielectric relaxation time restriction. Implementation is of comparable difficulty to that of a conventional Poisson´s equation, and is no more computationally intensive.
Keywords
dielectric relaxation; plasma devices; plasma simulation; 3D electrostatic potential; Poisson´s equation; dielectric relaxation time; dielectric relaxation time restriction; electrostatic potential; low pressure plasma reactors; numerical modeling; parameter spaces; plasma modelers; self-consistent plasma simulation; semi-implicit calculation; semi-implicit flux-correction techniques; time step constraints; very large scale simulations; Cathodes; Dielectrics; Dusty plasma; Electrodes; Electrostatics; Glow discharges; Plasma sheaths; Plasma simulation; Poisson equations; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.604968
Filename
604968
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