• DocumentCode
    1889954
  • Title

    Approximate, semi-implicit calculation of 3D electrostatic potential in a self-consistent plasma simulation

  • Author

    Keiter, Eric R. ; Kushner, Mark J.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
  • fYear
    1997
  • fDate
    19-22 May 1997
  • Firstpage
    238
  • Lastpage
    239
  • Abstract
    Summary form only given. Numerical modeling of low pressure plasma reactors is subject to numerous time step constraints, and among the most restrictive of these is the dielectric relaxation time. In recent years, semi-implicit flux-correction techniques have allowed plasma modelers to loosen the dielectric relaxation time step restriction. However, since these simulations do solve a form of Poisson´s equation, they still have a restriction on time step based on a modified, albeit less restrictive, dielectric relaxation time. For some parameter spaces this is acceptable, but for very large scale simulations (for example in three dimensions) and for simulations of systems having long time scales, obtaining a longer time step is crucial. We present a method for obtaining an approximate electrostatic potential which has no dielectric relaxation time restriction. Implementation is of comparable difficulty to that of a conventional Poisson´s equation, and is no more computationally intensive.
  • Keywords
    dielectric relaxation; plasma devices; plasma simulation; 3D electrostatic potential; Poisson´s equation; dielectric relaxation time; dielectric relaxation time restriction; electrostatic potential; low pressure plasma reactors; numerical modeling; parameter spaces; plasma modelers; self-consistent plasma simulation; semi-implicit calculation; semi-implicit flux-correction techniques; time step constraints; very large scale simulations; Cathodes; Dielectrics; Dusty plasma; Electrodes; Electrostatics; Glow discharges; Plasma sheaths; Plasma simulation; Poisson equations; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
  • Conference_Location
    San Diego, CA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-3990-8
  • Type

    conf

  • DOI
    10.1109/PLASMA.1997.604968
  • Filename
    604968