Title :
MMI-reflector: A novel on-chip reflector for photonic integrated circuits
Author :
Xu, L. ; Leijtens, X.J.M. ; Docter, B. ; de Vries, T. ; Smalbrugge, E. ; Karouta, F. ; Smit, M.K.
Author_Institution :
COBRA Res. Inst., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
We present a novel, compact, on-chip multi-mode interference (MMI) reflector, with near-100% theoretical reflection. We measured 78plusmn10% reflection for an InP-based MMI-reflector fabricated with a single etch step with inductively coupled plasma (ICP) etching technique.
Keywords :
III-V semiconductors; indium compounds; integrated optics; sputter etching; InP; MMI reflector; inductively coupled plasma etching; multimode interference reflector; on-chip reflector; photonic integrated circuits; Coupling circuits; Distributed Bragg reflectors; Etching; Mirrors; Optical reflection; Photonic integrated circuits; Plasma applications; Plasma measurements; Reflectivity; Semiconductor materials;
Conference_Titel :
Optical Communication, 2009. ECOC '09. 35th European Conference on
Conference_Location :
Vienna
Print_ISBN :
978-1-4244-5096-1
