Title :
Low size dispersion of inas quantum islands emitting at 1.55/spl mu/m on InP [001]
Author :
Monat, C. ; Gendry, M. ; Brault, J. ; Besland, M.P. ; Regreny, P. ; Hollinger, G. ; Salem, B. ; Olivares, J. ; Bremond, G. ; Marty, O.
Author_Institution :
LEOM, Ecole Centrale de Lyon, Ecully, France
Abstract :
We show that the size dispersion of InAs/InP(00l) quantum islands emitting at 1.S5μm can be reduced through the optimization of SSMBE growth parameters. In optimized growth conditions, i.e. high Tc ~520°C and low PAs = 2 10-6 torr leading to a 2D/3D growth mode transition measured by WEED at 1.8 ML, photoluminescence spectra with a FWHMs as low as 68meV at 300K have been obtained for a 4ML InSa deposit. Photoluminescence measurements as a function of the excitation power show that the multi-component PL spectra can be understood in terms of fundamental and excited levels of InAs islands. The fundamental peak (FWHM equal to 22meV at 8K) reveals a very low island size dispersion. Plane-view TEM and AFM images show that InAs islands are quantum << sticks >> aligned along [1-10], with flat top surfaces. Cross-section TEM imaging shows a very weak height dispersion attributed to the ability of the InAs/InP(00l) system to allow island height variation by monolayer fluctuation.
Keywords :
III-V semiconductors; atomic force microscopy; excited states; indium compounds; island structure; microdisc lasers; molecular beam epitaxial growth; photoluminescence; reflection high energy electron diffraction; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum dots; transmission electron microscopy; 1.55 micron; 2/spl times/10/sup -6/ torr; 22 meV; 300 K; 520 degC; 68 meV; 8 K; AFM; InAs; InAs quantum islands; InP; RHEED; TEM; excitation power; excited levels; fundamental levels; fundamental peak; low size dispersion; monolayer fluctuation; photoluminescence spectra; quantum sticks; size dispersion; very low island size dispersion; very weak height dispersion; Atomic force microscopy; Fabrication; Indium phosphide; Intrusion detection; Molecular beam epitaxial growth; Optical surface waves; Photoluminescence; Photonic integrated circuits; Power measurement; Temperature;
Conference_Titel :
Indium Phosphide and Related Materials Conference, 2002. IPRM. 14th
Conference_Location :
Stockholm, Sweden
Print_ISBN :
0-7803-7320-0
DOI :
10.1109/ICIPRM.2002.1014491