Performance of non-planar silicon diaphragms under large deflections

Thin non-planar silicon diaphragms are promising candidates for many high-performance microactuators, including microvalves and micropumps, since they can be batch fabricated using techniques that are compatible with the other portions of these devices. The fabrication and detailed simulation of such diaphragms, which are corrugated-bossed structures that unfold, accordionlike, to produce high boss deflections, are reported. Diaphragms 1 mm on a side, 3-μm thick, and containing five 10-μm-deep corrugations produce boss deflections of more than 30 μm at 760 mmHg, in close agreement with simulations. Effects related to corrugation profile diaphragm size and thickness, and internal stress are explored