Integrated micro-liquid dosing system

Author

Lammerink, Theo S J ; Elwenspoek, Miko ; Fluitman, Jan H J

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

fYear

1993

fDate

7-10 Feb 1993

Firstpage

254

Lastpage

259

Abstract

An integrated micro-liquid dosing system consisting of a micropump and a microliquid flow sensor is demonstrated. The dosing system allows accurate dosing of liquid in the microliter regime and can easily be integrated with components such as mixers and detectors in micro-liquid handling systems. The liquid pump is of the reciprocating type with a thermopneumatic actuator. The microliquid flow sensor is based on the thermal anemometer type. Both pump and flow sensor are realized in a 3-in (100)-Si wafer using a KOH bulk etch from both sides of the wafer. Due to its small heat capacity, the flow sensor has a small time constant, making it suitable for measuring the liquid flow. The effective liquid dose is calculated by integrating the flow sensor signal. The pumped flow is in the range of 0-50 μl/min

Keywords

actuators; flow control; hydraulic control equipment; materials handling; micromechanical devices; pumps; Si; Si wafer; integrated micro-liquid dosing system; microliquid flow sensor; micropump; reciprocating type; small heat capacity; small time constant; thermal anemometer type; thermopneumatic actuator; Actuators; Capacitive sensors; Detectors; Etching; Fluid flow; Fluid flow measurement; Micropumps; Sensor systems; Thermal sensors; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296913

Filename

296913